All technical data and features on this website are not binding and subject to change without notice.
WLI Linnik - Measurement of 3D surface topography
General
- Measurement of area surface topography
- Quantification of structures down to the sub-micrometer range
- Measurements on rough and smooth surfaces
- Features the highest possible magnification
- Very high lateral resolution
- Lateral resolution: > 0.2 µm
- Vertical resolution: < 1 nm
We are happy to advise
Technical Data
Measurement head
| Light source | LED | |
| Measurement range | [mm] | 150 |
| Vertical resolution | [nm] | <0.1 |
| Lateral resolution | [µm] | ≥0.2 |
| Stand off | [mm] | 0.3 (1) |
| Measurement area (objective dependent) | [µm] | 90 x 70 |
| Image size | [Pixel] | 1280 x 1024 |
Options
| Motorized stages: |
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| Displacement XY(Z) | [mm] | 50(...200) |
| Step width, min. | [µm] | 1 |
| Workstation with passive air dampers | ||
| Customized fixtures | ||
| Calibration standard | ||
| High-speed camera / Mega pixel camera | ||
Software
Operating system Windows XP / 7
Measurement and evaluation software for standard, scientific and industrial applications and customised modules available.
Applications
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Microstructure on a wafer surface
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Area profile and line cross section
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Area profile and line cross section
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Data sheet
Data sheet: WLILinnik.pdf
end faq
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